Tv is not of much use when the gaseous secondary detector is in use. Unlike conventional sems which require high vacuum in the specimen chamber, the microscope can be run in a highpressure environmental mode allowing the examination of hydrated or insulating samples. View and download philips xl300 user manual online. The philips xl30 sem operation procedure this section adapted from the philips user manual chapter 4, for detail, please refer to the user manual this chapter describes the basic operation of the microscope, involving several steps to achieve hardcopy results or image transfers to disk. If the images are saved correctly in the shared data folder on sem computer, you should be able to find your data in. Feiphilips xl30 field emission esem center for electron. Xl30 esem with npgs sop department of chemistry hku. Eliminating the weight and bulk associated with competitive devices, janams xg3 is the lightest industrialgrade mobile computer in its class. On the other hand, if xray analysis is desired, a high beam voltage is usually essential, as the voltage. Currently consult the manufacturers user manual for proper procedure, chapter 4. The xl30 sem feg offers high resolution secondary electron imaging at pressures as high as 10 torr and sample temperatures as high as 1,000c. The quanta sem line now includes even more flexibility with the release of the quanta 50 sem series. This microscope is a high performance, extremely flexible and wellequipped microscope for general purpose microscopy, lowvacuum and environmental scanning microscopy esem, and electron.
Then you can save the image as a tiff or jpeg image in the xl30 shared data folder on desktop. Its maximum resolution under optimal conditions is 3. It is easy to use for examining and survey the morphology of the nano devices. Scanning electron microscope operation page 9 of 85 author. The philips feg sem handbook this section adapted from the philips user manual chapter 4 this chapter describes the basic operation of the microscope, involving several steps to achieve hardcopy results or image transfers to disk. For materials science, these new instruments address the need to investigate a wide variety of materials and characterize structure and composition. It can be used for conventional high vacuum imaging, or in the environmental mode, can be used to examine wet, oily, gassy or nonconducting samples. Sem dc servomotors in the ranges mt22, mt30, mt40 and mt52 conform to the ec directive. Feiphilips xl30 feg esem, with electron backscatter diffraction analysis and energydispersive xray capability. To obtain a single frame at slow scan 3, press the f2 key on the keyboard at any time. If the images are saved correctly in the shared data folder on sem computer, you should be able to find your data in the shared data folder for xl30 on the computers in.
Typically, when the sem changes from one magnification range to another, an audible click may be heard andor a glitch may be seen on the sem image. Xg3 user manual janam technologies llc 11 1 introduction the xg3 is janams nextgeneration, gunshaped, rugged mobile computer designed to excel in the most challenging environments. Optimum performance of the sem for any particular application depends on the selection of the correct beam conditions. Before using the microscope, first you should use your assigned username and password to login to the. All maintenance should follow the procedure s set forth in the manufacturers maintenance and operations manuals. Safe usage of smif sem2 feixl30 esem dont press the buttons on the sem module on the front of the chamber. Feiphilips xl30 feg esem, with electron backscatter diffraction analysis and energydispersive xray capability esem images from philips electron optics this microscope is a high performance, extremely flexible and wellequipped microscope for general purpose microscopy, lowvacuum and environmental scanning microscopy esem, and electron. The quanta line of scanning electron microscopes are versatile, highperformance instruments with three modes high vacuum, low vacuum and esem to accommodate the widest range of samples of any sem system.
The xl fegsfegsirion scanning electron microscope operating. Apr 23, 2017 basic sem alignment source tilt, focus, astigmatism, lens alignment duration. This makes the system ideal for dedicated research in metallography as. Philips fei xl30 sem edax xray analysis scanning electron. The philipsfei xl30 esem environmental scanning electron microscope can perform high vacuum, low vacuum and wet modes imaging from 1kv30kv and 10x100,000x magnification. Feiphilips xl30 field emission esem the xl30 esem combines a highbrightness feg source with a conventional electron column. This means that wet, oily, dirty, outgassing, and nonconductive samples can be examined in their natural state without significant sample modification or preparation. This xl30 also equipped with eds detector to provide the composition information.
Philips xl 40 esem electron optics facility michigan. Florida center for analytical electron microscopy college. The kavli nanoscience institute at caltech,287 views. Be sure the lever on the black manual valve behind the microscope column is at hivac position. Sanitas sem 30 instructions for use manual 44 pages abdominal toning belt. A field emission high resolution sem equipped with oxford eds. Advanced accessories include a thinwindow energy dispersive spectrometer eds and hot or cold stages. This manual for your standard xl scanning electron microscope is. This btink ie slightly faefer than the indcation for the staymode.
Removed by request from fei the quanta feg user operation manual 4022 290 22214. Thermo scientific introduces quattro sem for materials science, an ultraversatile highresolution. We have 1 sanitas sem 30 manual available for free pdf download. The sem is utilized by a diverse user group, from forensics, biomedical engineers, biologists and hard material scientists to geologists and failure analysts. The fei philips xl 40 environmental scanning microscope is a large chamber scanning electron microscope capable of imaging hydrated and contaminated samples. Xl30 image display to the screen on the right side. On the 7015 keypade the instant indicator will be on.
The magnification is up to 800,000x with 2 nm resolution. The philips xl30 esem is a flexible scanning electron microscope with a large chamber. See sem philips xl30 manual pdf for detailed operation procedures. A certificate of conformity is available from sem sales on request. The xl30 esemfeg employs the stable, high brightness schottky field emission source for outstanding observation performance of. The xl 30 offers a 4 axis motorized stage with full manual override. Fei highperformance electron microscopy workflow solutions. The integration of advanced electron optics and extensive system automation with a unique, highlevel user shell has produced a precision instrument with exceptional levels of product data sheet versatile conventional sem low cost of ownership windows nt network compatible.
All the quanta sem systems can be equipped with analytical systems, such as energy dispersive spectrometer, wavelength dispersive xray spectroscopy and electron backscatter diffraction. Npgs solutions to problems npgs for sem lithography. The magnification is up to 800,000x with 2nm resolution. It is assumed that the instrument has been started up. Philips electron optics xl30 sem scanning electron microscope set up with detectors for energydispersive xray spectroscopy edx or edax pw 663005 9432 066 30001. After vacuum reaches 105, click the 60% button to put the turbopump at 60% speed. Basic sem alignment source tilt, focus, astigmatism, lens alignment duration. Emcdirective electro magnetic compatibility 89336eec. This is an excellent tool for both experienced and firsttime users. Philips scanning electron microscope xl30 feg departement. Enclosures for protection against the high voltages of the sem power supply e. Additionally, keypad the rdy fight will bfink on the xl4612rm or xl4612sm. In general, a higher beam voltage penetrates the sample more, leading to a lack of surface specificity in the image. Philips fei xl30 feg sem with edax eds complete system.
It is easy to use for examining and survey the morphology of the nano. The upper group of controls allow the user to choose the scan rate. This directive applies to products or appliances with an intrinsic function for the end user in which. After tv, the fastest is slow scan 1, the slowest is slow scan 3. User friendliness is a special benefit of the xl30. Instant user deprees the instant key followed by your user code.
Fei xl30sfeg highresolution scanning electron microscope the xl30sfeg is a highresolution scanning electron microscope capable of resolutions better than 2 nm, magnifications over 600 kx, and operating voltages from 200 volts up to 30 kv with 1 kv and 2 kv being routine. Close chamber, switch manual valve to hivac if necessary, and click pump. The results are good, high quality products with maximum process reliability, which make production processes more efficient. Thermo scientific introduces prisma e sem for materials science, the most complete sem for multiuser laboratories requiring allround performance and easeofuse. The microscope can be operated both at low accelerating voltage 200v and high accelerating voltage 30kv.
Philips xl30 feg sem is located in room 140 engineering tower building 303 on uci campus map philips xl30 feg sem with eds noran 6 system is a thermionic field emission sem which is fully automatic gun configuration controlled by advanced computer technology. Operating voltage should be set to 15kev or higher and a spot size of 4 or 5 is recommended. For more information, see pattern noise from sem below and system installation. Disclaimer benq corporation makes no representations or warranties, either expressed or implied, with respect to the contents hereof and specifically disclaims any warranties, merchantability or fitness for any particular purpose. The xl30 is a conventional sem with optimum performance for both imaging and microanalysis of conductive andor coated specimens.
Weber schraubautomaten gmbh is a familyrun, innovative company that places great emphasis on the sustainable design of the value chain. Sem is a versatile instrument that is capable of imaging a wide range of materials from uncoated soft tissues to hard rocks in variable pressure conditions. C load a sample and evacuate the chamber c obtain an electron beam c obtain a secondary electron image c learn to focus. This user manual gives an overview of the application, administration, interpretation and reliability and validity of the mlq30 normative questionnaire. Leaving the sem for the next user 29 decrease the magnification to the minimum value. You should refer to these procedures to assist you with your session. Sanitas sem 30 manuals manuals and user guides for sanitas sem 30. Samples can be examined in an atmosphere of up to 10 torr of water vapour, oxygen, nitrogen carbon dioxide. A ccd camera is mounted to allow the user to control the position of the sample inside the specimen chamber. Fei xl30 sfeg highresolution scanning electron microscope the xl30 sfeg is a highresolution scanning electron microscope capable of resolutions better than 2 nm, magnifications over 600 kx, and operating voltages from 200 volts up to 30 kv with 1 kv and 2 kv being routine. General operating procedures january 14 th16 follow the directions listed under general operating procedures for the philips xl30 sem. The xl30 is the conventional scanning electron microscope of the xl series from philips and is suitable for a wide variety of applications. The philips xl30 sem operation procedure this section adapted from the philips user manual chapter 4, for detail, please refer to the user manual this chapter describes the basic page 527. Philips xl30 feg sem with edax eds system is a thermionic field emission sem which is fully automatic gun configuration controlled by advanced computer technology.
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